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Mesh generation in Comsol 4.3b for Stacked

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Hi Guys.
I have 4 stacked layers starting from very thick (50 um) to very thin (30 nm) thicknesses. I have problem with mesh generation. Tried everything but could not mesh the geometry. The thinnest layer cannot be meshed. Could anyone help me out here?!
Thank you.
Mohsen

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