Hello guys
I'm trying to mesh a MEMS chip, which is a Pt Temperature sensor.
There is a Si wafer, thermal oxide, patterning Pt and deposit PECVD oxide.
When there is no PECVD oxide, I could mesh this chip using swept mesh.
However, I cannot mesh when there is a 'cover' of PECVD oxide.
What should I do?
Any opinions will be welcomed^^
I'm trying to mesh a MEMS chip, which is a Pt Temperature sensor.
There is a Si wafer, thermal oxide, patterning Pt and deposit PECVD oxide.
When there is no PECVD oxide, I could mesh this chip using swept mesh.
However, I cannot mesh when there is a 'cover' of PECVD oxide.
What should I do?
Any opinions will be welcomed^^